Thin film thickness measurements using Scanning White Light Interferometry
نویسندگان
چکیده
منابع مشابه
Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry.
As an extension of the authors' previous report of Ref 1, we describe an improved version of dispersive white-light interferometry that enables us to measure the tomographical thickness profile of a thin-film layer through Fourier-transform analysis of spectrally-resolved interference signals. The group refractive index can also be determined without prior knowledge of the geometrical thickness...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2014
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.10.005